The Busch Semiconductor Vacuum Group was founded in 1999 with the aim of better serving the vacuum needs of semiconductor and flat panel display market.
Busch Semiconductor Vacuum Group supply a range of products noted for their functionality, compactness, ease of use and minimal environmental impact. Continuous investment in R&D is fundamental to the group's remarkable success to date. This focus has resulted in the development of "next generation" products, together with our advanced pump monitoring system, universal tool interface and 300 mm compliant products.
Busch Vacuum Pumps and Systems is one of the largest manufacturers of vacuum pumps, blowers and compressors in the world.
With over 50 years of experience and top qualified personnel, we are forward-looking and strive to improve our products and ourselves. We are constantly at work developing innovative technologies that will define the vacuum world of the future.